| Diameter | 4" | 5" | 6" | 8" | |
| Device Layer | Dopant | Boron, Phos, Arsenic, Antimony, Undoped | |||
| Orientation | <100>, <111> | ||||
| Type | SIMOX, BESOI, Simbond, Smart-cut | ||||
| Resistivity | 0.001-20000 Ohm-cm | ||||
| Thickness (um) | 0.2-150 | ||||
| The Uniformity | <5% | ||||
| BOX Layer | Thickness (um) | 0.4-3 | |||
| Uniformity | <2.5% | ||||
| Substrate | Orientation | <100>, <111> | |||
| Type/Dopant | P Type/Boron , N Type/Phos, N Type/As, N Type/Sb | ||||
| Thickness (um) | 300-725 | ||||
| Resistivity | 0.001-20000 Ohm-cm | ||||
| Surface Finished | P/P, P/E | ||||
| Particle | <10@.0.3um | ||||
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