| Diameter | 2" | 3" | 4" | 5" | 6" | 8" | 12" |
| Grade | Prime | ||||||
| Growth Method | CZ | ||||||
| Orientation | < 1-0-0 > , < 1-1-1 > , < 1-1-0 > | ||||||
| Type/Dopant | P Type/Boron , N Type/Phos, N Type/As, N Type/Sb | ||||||
| Thickness (μm) | 279 | 380 | 525 | 625 | 675 | 725 | 775 |
| Thickness Tolerance | Standard ± 25μm, Maximum Capabilities ± 5μm | ± 20μm | ± 20μm | ||||
| Resistivity | 0.001 - 100 ohm-cm | ||||||
| Surface Finished | P/E , P/P, E/E, G/G | ||||||
| TTV (μm) | Standard < 10 um, Maximum Capabilities <5 um | ||||||
| Bow/Warp (?m) | Standard <40 um, Maximum Capabilities <20 um | <40μm | <40μm | ||||
| Particle | <10@0.5um; <10@0.3um; <10@0.2um; | ||||||
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